Fabrication of microstructures for modeling transport in porous materials

David J. Mears; Scott W. Straka; W. Mark Saltzman; Norman F. Sheppard

Fabrication of microstructures for modeling transport in porous materials

David J. Mears^*
, Scott W. Straka
, W. Mark Saltzman
, Norman F. Sheppard

^*Corresponding author for this work

Anatomy, Physiology, and Genetics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Silicon micromachining was used to fabricate microstructures for modeling transport in porous systems. A linear network of pores connected by narrow channels was etched into silicon to create constricted pore networks. The use of micromachining enables the creation of structures having the same characteristic dimensions as the pore networks found in polymeric controlled release systems. A two mask process was developed to reduce undercutting of convex corners during the anisotropic etching of the silicon. Initial studies of the release of a fluorescent dye out of the micromachined pore network are presented.

Original language	English
Title of host publication	1993 IEEE 19th Annual Northeasrt Bioengineering Conference
Publisher	Publ by IEEE
Pages	143-144
Number of pages	2
ISBN (Print)	0780309251
State	Published - 1993
Event	Proceedings of the 1993 IEEE 19th Annual Northeast Bioengineering Conference - Newark, NJ, USA Duration: 18 Mar 1993 → 19 Mar 1993

Publication series

Name	Bioengineering, Proceedings of the Northeast Conference

Conference

Conference	Proceedings of the 1993 IEEE 19th Annual Northeast Bioengineering Conference
City	Newark, NJ, USA
Period	18/03/93 → 19/03/93

Cite this

@inproceedings{1d55ec0097ed4b9287468ceefdf11409,

title = "Fabrication of microstructures for modeling transport in porous materials",

abstract = "Silicon micromachining was used to fabricate microstructures for modeling transport in porous systems. A linear network of pores connected by narrow channels was etched into silicon to create constricted pore networks. The use of micromachining enables the creation of structures having the same characteristic dimensions as the pore networks found in polymeric controlled release systems. A two mask process was developed to reduce undercutting of convex corners during the anisotropic etching of the silicon. Initial studies of the release of a fluorescent dye out of the micromachined pore network are presented.",

author = "Mears, \{David J.\} and Straka, \{Scott W.\} and Saltzman, \{W. Mark\} and Sheppard, \{Norman F.\}",

year = "1993",

language = "English",

isbn = "0780309251",

series = "Bioengineering, Proceedings of the Northeast Conference",

publisher = "Publ by IEEE",

pages = "143--144",

booktitle = "1993 IEEE 19th Annual Northeasrt Bioengineering Conference",

note = "Proceedings of the 1993 IEEE 19th Annual Northeast Bioengineering Conference ; Conference date: 18-03-1993 Through 19-03-1993",

}

Mears, DJ, Straka, SW, Saltzman, WM & Sheppard, NF 1993, Fabrication of microstructures for modeling transport in porous materials. in 1993 IEEE 19th Annual Northeasrt Bioengineering Conference. Bioengineering, Proceedings of the Northeast Conference, Publ by IEEE, pp. 143-144, Proceedings of the 1993 IEEE 19th Annual Northeast Bioengineering Conference, Newark, NJ, USA, 18/03/93.

Fabrication of microstructures for modeling transport in porous materials. / Mears, David J.; Straka, Scott W.; Saltzman, W. Mark et al.
1993 IEEE 19th Annual Northeasrt Bioengineering Conference. Publ by IEEE, 1993. p. 143-144 (Bioengineering, Proceedings of the Northeast Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of microstructures for modeling transport in porous materials

AU - Mears, David J.

AU - Straka, Scott W.

AU - Saltzman, W. Mark

AU - Sheppard, Norman F.

PY - 1993

Y1 - 1993

N2 - Silicon micromachining was used to fabricate microstructures for modeling transport in porous systems. A linear network of pores connected by narrow channels was etched into silicon to create constricted pore networks. The use of micromachining enables the creation of structures having the same characteristic dimensions as the pore networks found in polymeric controlled release systems. A two mask process was developed to reduce undercutting of convex corners during the anisotropic etching of the silicon. Initial studies of the release of a fluorescent dye out of the micromachined pore network are presented.

AB - Silicon micromachining was used to fabricate microstructures for modeling transport in porous systems. A linear network of pores connected by narrow channels was etched into silicon to create constricted pore networks. The use of micromachining enables the creation of structures having the same characteristic dimensions as the pore networks found in polymeric controlled release systems. A two mask process was developed to reduce undercutting of convex corners during the anisotropic etching of the silicon. Initial studies of the release of a fluorescent dye out of the micromachined pore network are presented.

UR - https://www.scopus.com/pages/publications/0027206695

M3 - Conference contribution

AN - SCOPUS:0027206695

SN - 0780309251

T3 - Bioengineering, Proceedings of the Northeast Conference

SP - 143

EP - 144

BT - 1993 IEEE 19th Annual Northeasrt Bioengineering Conference

PB - Publ by IEEE

T2 - Proceedings of the 1993 IEEE 19th Annual Northeast Bioengineering Conference

Y2 - 18 March 1993 through 19 March 1993

ER -

Fabrication of microstructures for modeling transport in porous materials

Abstract

Publication series

Conference

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