Growth and characterization of vertically aligned 1D IrO2 nanocrystals via reactive sputtering

A. V. Korotcov; Y. S. Huang; D. S. Tsai; K. K. Tiong

doi:10.1109/NANO.2005.1500830

Growth and characterization of vertically aligned 1D IrO₂ nanocrystals via reactive sputtering

A. V. Korotcov
, Y. S. Huang^*
, D. S. Tsai
, K. K. Tiong

^*Corresponding author for this work

Radiology and Bioengineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We report the preparation of 1D vertically aligned IrO₂ nanocrystals on LiNbO₃ (100) substrates by reactive magnetron sputtering with Ir metal target. The effects of sputtering conditions such as pressure, rf power, substrate temperature etc. have been presented and discussed. The surface morphology, structural and spectroscopic properties of the as-grown nanocrystals have been characterized using field-emission scanning electron microscopy (FESEM), X-ray diffractometry (XRD) and micro-Raman scattering. The red-shift and asymmetric broadening of Raman lineshape have been analyzed and attributed to both the size effect and residual stress.

Original language	English
Title of host publication	2005 5th IEEE Conference on Nanotechnology
Pages	765-768
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2005.1500830
State	Published - 2005
Event	2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan Duration: 11 Jul 2005 → 15 Jul 2005

Publication series

Name	2005 5th IEEE Conference on Nanotechnology
Volume	2

Conference

Conference	2005 5th IEEE Conference on Nanotechnology
Country/Territory	Japan
City	Nagoya
Period	11/07/05 → 15/07/05

Keywords

Field emission scanning electron microscopy
Iridium dioxide
Raman scattering
Reactive sputtering
X-ray spectroscopy

Access to Document

10.1109/NANO.2005.1500830

Cite this

@inproceedings{308e656e19e54a2ba64adc4adf16f81e,

title = "Growth and characterization of vertically aligned 1D IrO2 nanocrystals via reactive sputtering",

abstract = "We report the preparation of 1D vertically aligned IrO2 nanocrystals on LiNbO3 (100) substrates by reactive magnetron sputtering with Ir metal target. The effects of sputtering conditions such as pressure, rf power, substrate temperature etc. have been presented and discussed. The surface morphology, structural and spectroscopic properties of the as-grown nanocrystals have been characterized using field-emission scanning electron microscopy (FESEM), X-ray diffractometry (XRD) and micro-Raman scattering. The red-shift and asymmetric broadening of Raman lineshape have been analyzed and attributed to both the size effect and residual stress.",

keywords = "Field emission scanning electron microscopy, Iridium dioxide, Raman scattering, Reactive sputtering, X-ray spectroscopy",

author = "Korotcov, \{A. V.\} and Huang, \{Y. S.\} and Tsai, \{D. S.\} and Tiong, \{K. K.\}",

year = "2005",

doi = "10.1109/NANO.2005.1500830",

language = "English",

isbn = "0780391993",

series = "2005 5th IEEE Conference on Nanotechnology",

pages = "765--768",

booktitle = "2005 5th IEEE Conference on Nanotechnology",

note = "2005 5th IEEE Conference on Nanotechnology ; Conference date: 11-07-2005 Through 15-07-2005",

}

Korotcov, AV, Huang, YS, Tsai, DS & Tiong, KK 2005, Growth and characterization of vertically aligned 1D IrO₂ nanocrystals via reactive sputtering. in 2005 5th IEEE Conference on Nanotechnology., 1500830, 2005 5th IEEE Conference on Nanotechnology, vol. 2, pp. 765-768, 2005 5th IEEE Conference on Nanotechnology, Nagoya, Japan, 11/07/05. https://doi.org/10.1109/NANO.2005.1500830

Growth and characterization of vertically aligned 1D IrO₂ nanocrystals via reactive sputtering. / Korotcov, A. V.; Huang, Y. S.; Tsai, D. S. et al.
2005 5th IEEE Conference on Nanotechnology. 2005. p. 765-768 1500830 (2005 5th IEEE Conference on Nanotechnology; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Growth and characterization of vertically aligned 1D IrO2 nanocrystals via reactive sputtering

AU - Korotcov, A. V.

AU - Huang, Y. S.

AU - Tsai, D. S.

AU - Tiong, K. K.

PY - 2005

Y1 - 2005

N2 - We report the preparation of 1D vertically aligned IrO2 nanocrystals on LiNbO3 (100) substrates by reactive magnetron sputtering with Ir metal target. The effects of sputtering conditions such as pressure, rf power, substrate temperature etc. have been presented and discussed. The surface morphology, structural and spectroscopic properties of the as-grown nanocrystals have been characterized using field-emission scanning electron microscopy (FESEM), X-ray diffractometry (XRD) and micro-Raman scattering. The red-shift and asymmetric broadening of Raman lineshape have been analyzed and attributed to both the size effect and residual stress.

AB - We report the preparation of 1D vertically aligned IrO2 nanocrystals on LiNbO3 (100) substrates by reactive magnetron sputtering with Ir metal target. The effects of sputtering conditions such as pressure, rf power, substrate temperature etc. have been presented and discussed. The surface morphology, structural and spectroscopic properties of the as-grown nanocrystals have been characterized using field-emission scanning electron microscopy (FESEM), X-ray diffractometry (XRD) and micro-Raman scattering. The red-shift and asymmetric broadening of Raman lineshape have been analyzed and attributed to both the size effect and residual stress.

KW - Field emission scanning electron microscopy

KW - Iridium dioxide

KW - Raman scattering

KW - Reactive sputtering

KW - X-ray spectroscopy

UR - https://www.scopus.com/pages/publications/33746871146

U2 - 10.1109/NANO.2005.1500830

DO - 10.1109/NANO.2005.1500830

M3 - Conference contribution

AN - SCOPUS:33746871146

SN - 0780391993

SN - 9780780391994

T3 - 2005 5th IEEE Conference on Nanotechnology

SP - 765

EP - 768

BT - 2005 5th IEEE Conference on Nanotechnology

T2 - 2005 5th IEEE Conference on Nanotechnology

Y2 - 11 July 2005 through 15 July 2005

ER -