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Growth and characterization of vertically aligned densely packed TiO 2 nanocrystals on sapphire(100) via metal-organic chemical vapor deposition

C. A. Chen, A. Korotcov, Y. M. Chen, Y. S. Huang, D. S. Tsai, K. K. Tiong, P. C. Liao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Vertically aligned densely packed anatase- and rutile-phase TiO2 nanocrystals (NCs) have been grown by metal-organic chemical vapor deposition (MOCVD) on sapphire (SA)(100) substrates under different conditions, using titanium-tetraisopropoxide (Ti(OC3H7)4) as a source reagent. The surface morphology, structural and spectroscopic properties of the as-deposited NCs were characterized in detail using field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), X-ray diffractometry (XRD) and micro-Raman scattering. FESEM and TEM micrographs reveal the growth of vertically aligned NCs on SA(100) substrates. The XRD results indicate that the anatase-and rutile-TiO2 NCs are, respectively, (110) and (001) oriented on SA(100). Raman spectra show that pure anatase- and rutile- phase have been deposited. The roles of different growth conditions in the formation of different phases of the vertically aligned TiO2 NCs are studied and the probable mechanisms have been discussed.

Original languageEnglish
Title of host publicationECS Transactions - Nanotechnology General Session
PublisherElectrochemical Society Inc.
Pages19-25
Number of pages7
Edition11
ISBN (Electronic)9781566776141
ISBN (Print)9781605601847
DOIs
StatePublished - 2007
EventNanotechnology General Session - 212th ECS Meeting - Washington, DC, United States
Duration: 7 Oct 200712 Oct 2007

Publication series

NameECS Transactions
Number11
Volume11
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceNanotechnology General Session - 212th ECS Meeting
Country/TerritoryUnited States
CityWashington, DC
Period7/10/0712/10/07

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